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Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze.

By: Contributor(s): Material type: TextPublication details: New York : Wiley, c2004.Edition: Wiley international edDescription: xiii, 305 p. : ill. ; 26 cmISBN:
  • 0471232793
Subject(s): DDC classification:
  • 621.3815/2 22
LOC classification:
  • TK7871.85 .M378 2004
Online resources:
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Holdings
Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
Books CKT-UTAS Library General Stacks TK7871.85 M11 (Browse shelf(Opens below)) Available NAV-51704006673
Books CKT-UTAS Library General Stacks TK7871.85 M12 (Browse shelf(Opens below)) Available NAV-51704006674
Books CKT-UTAS Library General Stacks TK7871.85 M14 (Browse shelf(Opens below)) Available NAV-51612000676
Books CKT-UTAS Library Book Cart TK7871.85 M13 (Browse shelf(Opens below)) Available NAV-51612000675

Includes bibliographical references and index.

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